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Optical Engineering

Design and fabrication of polymer-based multimode interference optical splitters
Author(s): Yuxin Liang; Mingshan Zhao; Yuqing Luo; Yiying Gu; Yang Zhang; Linghua Wang; Xiuyou Han; Zhenlin Wu
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Paper Abstract

A polymer-based multimode interference optical splitter chip has been designed and fabricated. Fiber-waveguide coupling loss as well as the structure of the multimode waveguide are optimized in the design to achieve higher performance. A simple UV-based soft nanoimprint lithography (Soft UV-NIL) technique is adopted in the fabrication. Fluorinated acrylate resins, LFR, with different refractive indices are used in this work. Both the residual layer and waveguide deformation are improved by controlling the fabrication processes. An average of 12.98 dB insertion loss is obtained from 1×4 splitters with 1.08 dB uniformity and 0.05 dB polarization-dependent loss. The validity of the polymer optical splitters fabricated through Soft UV-NIL technique is demonstrated by software simulation as well as experimental works.

Paper Details

Date Published: 4 November 2016
PDF: 5 pages
Opt. Eng. 55(11) 117102 doi: 10.1117/1.OE.55.11.117102
Published in: Optical Engineering Volume 55, Issue 11
Show Author Affiliations
Yuxin Liang, Dalian Univ. of Technology (China)
Mingshan Zhao, Dalian Univ. of Technology (China)
Yuqing Luo, Dalian Univ. of Technology (China)
Yiying Gu, Dalian Univ. of Technology (China)
Yang Zhang, Dalian Univ. of Technology (China)
Linghua Wang, Fujian Institute of Research on the Structure of Matter (China)
Xiuyou Han, Dalian Univ. of Technology (China)
Zhenlin Wu, Dalian Univ. of Technology (China)

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