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Optical Engineering

Absolute test for cylindrical surfaces using the conjugate differential method
Author(s): Ya Huang; Jun Ma; Caojin Yuan; Christof Pruss; Weiyuan Sun; Mincai Liu; Rihong Zhu; Zhishan Gao; Wolfgang Osten
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Paper Abstract

An absolute testing method for cylindrical surfaces is presented in a null test setup with a computer-generated hologram. The absolute test exploits the symmetry of cylinders, which allows us to introduce a certain shift of the test surface both parallel to and rotated about the centerline while the null test condition is still maintained. With two shifts of the cylindrical surface, four measurements belonging to two groups in conjugate positions can be accomplished to obtain the absolute differential map with the interferometer and null optics errors removed. The absolute surface can be obtained by wavefront reconstruction from local differential data. A simulation of the method is presented to estimate the error propagation. Experimental absolute test results of a concave cylindrical surface with 100-mm radius are given. The measured profiles are compared with those obtained from a commercial profiler, showing a difference of less than 15 nm (root-mean-square).

Paper Details

Date Published: 15 November 2016
PDF: 7 pages
Opt. Eng. 55(11) 114104 doi: 10.1117/1.OE.55.11.114104
Published in: Optical Engineering Volume 55, Issue 11
Show Author Affiliations
Ya Huang, Nanjing Univ. of Science and Technology (China)
Jun Ma, Nanjing Univ. of Science and Technology (China)
Caojin Yuan, Nanjing Normal Univ. (China)
Christof Pruss, Institut für Technische Optik (Germany)
Weiyuan Sun, Nanjing Univ. of Science and Technology (China)
Mincai Liu, Nanjing Univ. of Science and Technology (China)
Chengdu Fine Optical Engineering Research Ctr. (China)
Rihong Zhu, Nanjing Univ. of Science and Technology (China)
Zhishan Gao, Nanjing Univ. of Science and Technology (China)
Wolfgang Osten, Univ. Stuttgart (Germany)

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