Share Email Print

Optical Engineering

Silicon-based guided-wave optical flow sensor using a diaphragm with a small opening as an orifice
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Our proposed silicon-based guided-wave optical flow sensor consists of a diaphragm with a small opening used as an orifice and a waveguide across the diaphragm. The sensor operates based on Bernoulli’s theorem and the elasto-optic effect. A sensor, which had a 10×10-mm2, 50-μm-thick diaphragm with a 0.34×0.34-mm2 opening, was fabricated to demonstrate and confirm the sensor operation. Measured output power as a function of flow rate using oxygen gas agreed quite well with the theoretical prediction although slight deviation was seen in the high flow rate region. Moreover, according to Bernoulli’s theorem, sensitivity is strongly dependent on sectional area of opening. So, three sensors with different opening areas, such as 0.28×0.28, 0.34×0.34, and 0.55×0.55  mm2, were fabricated to examine such a dependence, which would be helpful to design the sensor. The measured sensitivity was found to be almost proportional to area of the opening, similar to the theoretical prediction.

Paper Details

Date Published: 6 January 2016
PDF: 5 pages
Opt. Eng. 55(1) 017102 doi: 10.1117/1.OE.55.1.017102
Published in: Optical Engineering Volume 55, Issue 1
Show Author Affiliations
Masashi Ohkawa, Niigata Univ. (Japan)
Takashi Sato, Niigata Univ. (Japan)

© SPIE. Terms of Use
Back to Top