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Optical Engineering

Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry
Author(s): Risto Montonen; Ivan Kassamakov; Edward Hæggström; Kenneth Österberg
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Paper Abstract

The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60  μm ultraprecisely turned steps (surface roughness Ra≤25  nm, flatness ≤2  μm) on an oxygen-free electronic copper disc. The step heights were quantified to be (39.6±2.6)  μm and (59.0±2.3)  μm. The uncertainties are quoted at 95% confidence level and include contributions from calibration, refractive index of air, cosine error, surface roughness, and thermal expansion in comparison to standard temperature of 20°C. The results were verified by measuring the same steps using a commercial white light interferometer Veeco—NT3300. Our instrument can ensure that the accelerator discs of the CLIC are aligned within the tolerance required for efficient collider operation.

Paper Details

Date Published: 19 January 2016
PDF: 6 pages
Opt. Eng. 55(1) 014103 doi: 10.1117/1.OE.55.1.014103
Published in: Optical Engineering Volume 55, Issue 1
Show Author Affiliations
Risto Montonen, Helsinki Institute of Physics (Finland)
Univ. of Helsinki (Finland)
Ivan Kassamakov, Univ. of Helsinki (Finland)
Edward Hæggström, Univ. of Helsinki (Finland)
Kenneth Österberg, Univ. of Helsinki (Finland)

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