Share Email Print
cover

Optical Engineering

Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector
Author(s): Shijie Zhao; Haoyun Wei; Yan Li
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper describes the design and realization of a new type of heterodyne interferometer for simultaneously measuring displacement and angle using only one reference retroreflector. Theoretically, this interferometer has better angle accuracy compared with classical systems that employ two reference retroreflectors because it can avoid the relative displacement resulting from external factors. The optical and mechanical configurations of the proposed interferometer, which consists of a frequency-stabilized dual-frequency laser, a monolithic prism, and additional optical and electronic components, are designed and finely processed. The experimental results show that the angle accuracy of the interferometer is greater than ±0.15 arcsec in comparison with an autocollimator.

Paper Details

Date Published: 28 August 2015
PDF: 4 pages
Opt. Eng. 54(8) 084112 doi: 10.1117/1.OE.54.8.084112
Published in: Optical Engineering Volume 54, Issue 8
Show Author Affiliations
Shijie Zhao, Tsinghua Univ. (China)
Haoyun Wei, Tsinghua Univ. (China)
Yan Li, Tsinghua Univ. (China)


© SPIE. Terms of Use
Back to Top