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Optical Engineering

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry
Author(s): Run Huang; Peng Su; James H. Burge; Lei Huang; Mourad Idir
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Paper Abstract

The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1  nm root-mean-square accuracy for the surface measurement with low-order term included.

Paper Details

Date Published: 5 August 2015
PDF: 10 pages
Opt. Eng. 54(8) 084103 doi: 10.1117/1.OE.54.8.084103
Published in: Optical Engineering Volume 54, Issue 8
Show Author Affiliations
Run Huang, College of Optical Sciences, The Univ. of Arizona (United States)
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)
Lei Huang, Brookhaven National Lab. (United States)
Mourad Idir, Brookhaven National Lab. (United States)


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