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Optical Engineering

Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm
Author(s): Hua Shen; Rihong Zhu; Lei Chen; Jia Li
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Paper Abstract

As is well-known, optical testing has begun to emerge as a limiting factor in the application of freeform surfaces. In all kinds of published freeform optical metrology, the tilted-wave-interferometer (TWI) is the precise and flexible method for testing a freeform surface as it can compensate the local surface’s deviation from its best fit sphere by using a set of tilted waves. In the process of measurement with TWI, accurate assessment of the test surface error from the fringes plays a key role. We present a method for evaluation and characterization of surface aberrations in TWI by combining computer-generated wave technology and a retrace errors elimination algorithm. The feasibility of the method is proved by the simulation and experimental results.

Paper Details

Date Published: 27 July 2015
PDF: 9 pages
Opt. Eng. 54(7) 074105 doi: 10.1117/1.OE.54.7.074105
Published in: Optical Engineering Volume 54, Issue 7
Show Author Affiliations
Hua Shen, Nanjing Univ. of Science and Technology (China)
Rihong Zhu, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Jia Li, Nanjing Univ. of Science and Technology (China)

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