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Optical Engineering

Radial-quality uniformity investigations of large-area thick Al films
Author(s): Haigui Yang; Zizheng Li; Xiaoyi Wang; Zhenfeng Shen; Jinsong Gao; Shanwen Zhang
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Paper Abstract

The fabrication of high-quality large-area thick Al films with a thickness around 10  μm or even more is one of the most important factors to realize high-performance large-size echelle gratings. During the deposition process of large-area Al films, Al film quality generally exhibits a different behavior along the radius (R) direction, which seriously affects the performance of echelle gratings. In this study, for the first time, we investigate the radial-quality uniformity of large-area (R=400  mm) thick (<10  μm) Al films in detail. We not only analyze the radial-quality difference of Al films prepared by the traditional electron-beam evaporation process, but also significantly improve the radial-quality uniformity of large-area thick Al films by using a coevaporation process. By comparing two kinds of film coating processes, we clarify the origin of the radial-quality difference of Al films, and prepare large-area thick Al films with excellent radial-quality uniformity.

Paper Details

Date Published: 28 April 2015
PDF: 6 pages
Opt. Eng. 54(4) 045106 doi: 10.1117/1.OE.54.4.045106
Published in: Optical Engineering Volume 54, Issue 4
Show Author Affiliations
Haigui Yang, Chinese Academy of Sciences (China)
Zizheng Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Chinese Academy of Sciences (China)
Xiaoyi Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhenfeng Shen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jinsong Gao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Chinese Academy of Sciences (China)
Shanwen Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


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