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Optical Engineering

Reconstruction of planar periodic structures based on Fourier analysis of moiré patterns
Author(s): Ronghua Zhu; Huimin Xie; Minjin Tang; Chuanwei Li; Dan Wu
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Paper Abstract

In recent years, inverse moiré methods have been developed to reconstruct micro/nano-scale planar periodic structures with a larger field of view than those constructed using conventional methods. In these methods, moiré fringes generated by superposition of the periodic structure and a reference grating are analyzed to reconstruct the periodic structure. There are two approaches to inverse moiré methods: the fringe-centerlines method and the phase-shifting method. The former has lower accuracy and is difficult to automate, while the latter requires at least three moiré images with complicated processing. A reconstruction method for planar periodic structures using Fourier analysis is proposed. This method can be used to characterize the micro/nano periodic structure from a single microscope moiré pattern. At the same time, when combined with a linewidth characterization method, the period and linewidth of the microstructure can be obtained simultaneously. As practical examples, the period and linewidth of a scanning electron microscopy raster are calibrated. Then the microstructures of a micro-electroformed grating and a butterfly wing are reconstructed using the calibrated system. The proposed method provides a tool for the characterization of large area micro/nano periodic structures. Further, this is a promising approach to detect defects in periodic structures.

Paper Details

Date Published: 9 April 2015
PDF: 9 pages
Opt. Eng. 54(4) 044102 doi: 10.1117/1.OE.54.4.044102
Published in: Optical Engineering Volume 54, Issue 4
Show Author Affiliations
Ronghua Zhu, Tsinghua Univ. (China)
Huimin Xie, Tsinghua Univ. (China)
Minjin Tang, Tsinghua Univ. (China)
Chuanwei Li, Tsinghua Univ. (China)
Dan Wu, Tsinghua Univ. (China)

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