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Optical Engineering

Straightforward technique for in situ imaging of spin-coated thin films
Author(s): Daniel T. W. Toolan
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Paper Abstract

Spin-coating provides a facile method for the production of highly uniform thin films that have applications as photoresists, coatings, and in organic electronics. Due to the rapid high-speed nature of spin-coating, obtaining data in situ has proved problematic. Recently, a number of in situ characterization techniques have provided new insights into the processes occurring during spin-coating. This paper demonstrates a straightforward method for obtaining in situ optical reflectance images during spin-coating that provide insights into film thinning dynamics, the origins of surface inhomogeneities caused by contaminated substrates, and crystallization processes. This technique could be easily implemented industrially and in many laboratories and will allow for a better understanding of the spin-coating process.

Paper Details

Date Published: 24 February 2015
PDF: 5 pages
Opt. Eng. 54(2) 024109 doi: 10.1117/1.OE.54.2.024109
Published in: Optical Engineering Volume 54, Issue 2
Show Author Affiliations
Daniel T. W. Toolan, The Univ. of Sheffield (United Kingdom)

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