Share Email Print
cover

Optical Engineering

Design and fabrication of sine-top broadband gold-coated gratings
Author(s): Bilali Muhutijiang; Keqiang Qiu; Xiaolong Jiang; Shaojun Fu
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Fabrication and testing results of sine-top, high-efficiency, broadband gold-coated gratings (BGCG) for high-power laser pulse compression applications are reported. These gratings differ from conventional metal-on-photoresist pulse compression gratings in that the gratings patterns are generated by directly etching the quartz substrate. The groove depth and duty cycle of the photoresist mask was controlled by changing photoresist thickness and adjusting exposure and development times, respectively. The duty cycle of the photoresist mask was further corrected by oxygen plasma etching. Using this method, high efficiency, sine-top, BGCG with line densities of 1740  lines/mm was achieved. The average diffraction efficiency at the-1st order was 89.2% and the peak value was 90% for TM polarized light as the wavelength increases from 750 to 850 nm.

Paper Details

Date Published: 20 October 2015
PDF: 6 pages
Opt. Eng. 54(10) 105109 doi: 10.1117/1.OE.54.10.105109
Published in: Optical Engineering Volume 54, Issue 10
Show Author Affiliations
Bilali Muhutijiang, Univ. of Science and Technology of China (China)
Xinjiang Normal Univ. (China)
Keqiang Qiu, Univ. of Science and Technology of China (China)
Xiaolong Jiang, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


© SPIE. Terms of Use
Back to Top