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Optical Engineering

Study on the roughness evolution of optical surfaces during ion beam sputtering
Author(s): Xiao Liang; Xiang Wang; Yong-Qiang Gu; Jin-Jin Zheng; Huai-Jiang Yang; Yong-Xin Sui
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Paper Abstract

Ion beam machining technology has been extensively adopted to obtain an ultraprecision surface in ultraviolet lithography optics. However, there exist complex mechanisms leading the surface to evolve complicated topographies and increasing roughness. We build a kinetic model integrating with the typical sputter theory and a bond-counting Monte Carlo algorithm based on the compound materials to investigate the surface roughness evolution during ion beam sputtering. The influences of primary sputter, reflection, secondary sputter, geometrical shadowing, redeposition, and thermal diffusion were all taken into consideration to compose a dynamic evolution process. In calculation, using this model the surface first possesses a period of smoothing and then goes into a roughening stage, where the roughness follows the regular power law. Quantitative analyses of surface roughness derived from calculations are also examined and compared with experiments.

Paper Details

Date Published: 12 October 2015
PDF: 5 pages
Opt. Eng. 54(10) 104105 doi: 10.1117/1.OE.54.10.104105
Published in: Optical Engineering Volume 54, Issue 10
Show Author Affiliations
Xiao Liang, Univ. of Science and Technology of China (China)
Xiang Wang, Univ. of Science and Technology of China (China)
Yong-Qiang Gu, Chinese Academy of Sciences (China)
Jin-Jin Zheng, Univ. of Science and Technology of China (China)
Huai-Jiang Yang, Chinese Academy of Sciences (China)
Yong-Xin Sui, Chinese Academy of Sciences (China)


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