Share Email Print
cover

Optical Engineering • Open Access

Advanced environmental control as a key component in the development of ultrahigh accuracy <italic<ex situ</italic< metrology for x-ray optics

Paper Abstract

The advent of fully coherent free-electron laser and diffraction-limited synchrotron radiation storage ring sources of x-rays is catalyzing the development of new ultrahigh accuracy metrology methods. To fully exploit these sources, metrology needs to be capable of determining the figure of an optical element with subnanometer height accuracy. The major limiting factors of the current absolute accuracy of <italic<ex situ</italic< metrology are drift errors due to temporal instabilities of the lab’s environmental conditions and systematic errors inherent to the metrology instruments. Here, we discuss in detail work at the Advanced Light Source X-Ray Optics Laboratory on building of advanced environmental control that is a key component in the development of ultrahigh accuracy <italic<ex situ</italic< metrology for x-ray optics. By a few examples, we show how the improvement of the environmental conditions in the lab allows us to significantly gain efficiency in performing <italic<ex situ</italic< metrology with high-quality x-ray mirrors. The developed concepts and approaches, included in the design of the new X-Ray Optics Laboratory, are described in detail. These data are essential for construction and successful operation of a modern metrology facility for x-ray optics, as well as high-precision measurements in many fields of experimental physics.

Paper Details

Date Published: 12 October 2015
PDF: 14 pages
Opt. Eng. 54(10) 104104 doi: 10.1117/1.OE.54.10.104104
Published in: Optical Engineering Volume 54, Issue 10
Show Author Affiliations
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Ian Lacey, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Howard A. Padmore, Lawrence Berkeley National Lab. (United States)


© SPIE. Terms of Use
Back to Top