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Optical Engineering • Open Access

Highly efficient deterministic polishing using a semirigid bonnet
Author(s): Chunjin Wang; Wei Yang; Zhenzhong Wang; Xu Yang; Zhiji Sun; Bo Zhong; Ri Pan; Ping Yang; Yinbiao Guo; Qiao Xu

Paper Abstract

This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ . Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36  mm3 of material is removed.

Paper Details

Date Published: 9 September 2014
PDF: 9 pages
Opt. Eng. 53(9) 095102 doi: 10.1117/1.OE.53.9.095102
Published in: Optical Engineering Volume 53, Issue 9
Show Author Affiliations
Chunjin Wang, Xiamen Univ. (China)
China Academy of Engineering Physics (China)
Wei Yang, Xiamen Univ. (China)
Zhenzhong Wang, Xiamen Univ. (China)
Xu Yang, Xiamen Univ. (China)
China Academy of Engineering Physics (China)
Zhiji Sun, Xiamen Univ. (China)
China Academy of Engineering Physics (China)
Bo Zhong, Chengdu Fine Optical Engineering Research Ctr. (China)
Ri Pan, Xiamen Univ. (China)
Ping Yang, Xiamen Univ. (China)
Yinbiao Guo, Xiamen Univ. (China)
Qiao Xu, China Academy of Engineering Physics (China)

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