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Optical Engineering

<italic<In situ</italic< and <italic<ex situ</italic< characterization of optical surfaces by light scattering techniques
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Paper Abstract

The continuous development of optical technologies and the accompanying requirements on the manufacturing process place challenging demands on metrology. In addition to highly sensitive and robust measurement techniques, the inspection tools should be fast and capable of characterizing large and complex-shaped surfaces. These aspects can be addressed by light-scattering-based characterization techniques, which also enable a large flexibility for the measurement conditions because of the noncontact data acquisition and are, thus, suited not only for <italic<ex situ</italic< but also <italic<in situ</italic< characterization scenarios. Application examples ranging from the roughness characterization of magneto-rheological finished substrates to polished extreme ultraviolet mirror substrates with diameters of more than 600 mm by compact as well as laboratory-based instruments are presented.

Paper Details

Date Published: 11 August 2014
PDF: 6 pages
Opt. Eng. 53(9) 092013 doi: 10.1117/1.OE.53.9.092013
Published in: Optical Engineering Volume 53, Issue 9
Show Author Affiliations
Marcus Trost, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Tobias Herffurth, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Sven Schröder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Angela Duparré, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Matthias Beier, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Stefan Risse, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert R. Bowering, Cymer B.V. (Netherlands)


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