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Optical Engineering

Far-field spatially angle-resolved scattering measurements: practical way to recover surface topography
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Paper Abstract

Angle-resolved scattering techniques are currently used to extract the second-order statistical moments (roughness spectra or autocorrelation function) of surface topography, but have not allowed the recovery of the surface topography itself. We show how we could solve this point with an original setup based on spatially resolved measurements. Hence, the technique provides a breakthrough in light-scattering characterization.

Paper Details

Date Published: 15 August 2014
PDF: 7 pages
Opt. Eng. 53(9) 092012 doi: 10.1117/1.OE.53.9.092012
Published in: Optical Engineering Volume 53, Issue 9
Show Author Affiliations
Myriam Zerrad, Institut Fresnel (France)
Michel Lequime, Institut Fresnel (France)
Claude Amra, Institut Fresnel (France)


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