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Optical Engineering

Magnetorheological finishing for removing surface and subsurface defects of fused silica optics
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Paper Abstract

We investigate the capacity of magnetorheological finishing (MRF) process to remove surface and subsurface defects of fused silica optics. Polished samples with engineered surface and subsurface defects were manufactured and characterized. Uniform material removals were performed with a QED Q22-XE machine using different MRF process parameters in order to remove these defects. We provide evidence that whatever the MRF process parameters are, MRF is able to remove surface and subsurface defects. Moreover, we show that MRF induces a pollution of the glass interface similar to conventional polishing processes.

Paper Details

Date Published: 22 May 2014
PDF: 7 pages
Opt. Eng. 53(9) 092010 doi: 10.1117/1.OE.53.9.092010
Published in: Optical Engineering Volume 53, Issue 9
Show Author Affiliations
Rodolphe Catrin, Commissariat à l'Énergie Atomique (France)
Jerome Neauport, Commissariat à l'Énergie Atomique (France)
Daniel Taroux, Commissariat à l'Énergie Atomique (France)
Philippe Cormont, Commissariat à l'Énergie Atomique (France)
Cedric Maunier, Commissariat à l'Énergie Atomique (France)
Sebastien Lambert, Commissariat à l'Énergie Atomique (France)

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