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Optical Engineering

CO2 laser mitigation of the ultraviolet laser damage site on a fused silica surface
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Paper Abstract

The CO2 laser mitigation method has been developed to mitigate the ultraviolet laser damage site on a fused silica surface. The mitigation process was monitored by an on-line white light scattering imaging system in order to ensure that the mitigation is successful. Additionally, a total internal reflection microscope was utilized to analyze the mitigation pit. By optimizing the laser mitigation parameters, the rough damage site can be replaced by a smooth Gaussian-shaped mitigation pit. The chemical composition of the damage sites and the CO2 laser mitigation pits was also measured with energy dispersive x-ray spectroscopy. It reveals that the oxygen deficiency center defect of the ultraviolet laser damage site is removed after CO2 laser mitigation, which helps us better understand the CO2 laser mitigation process.

Paper Details

Date Published: 8 August 2014
PDF: 7 pages
Opt. Eng. 53(8) 084107 doi: 10.1117/1.OE.53.8.084107
Published in: Optical Engineering Volume 53, Issue 8
Show Author Affiliations
Zhou Fang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Yuan’an Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Wei Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Zehan Li, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Guohang Hu, Shanghai Institute of Optics and Fine Mechanics (China)
Xiaofeng Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Dawei Li, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


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