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Optical Engineering

Method to calculate the error correction ability of tool influence function in certain polishing conditions
Author(s): Jia Wang; Bin Fan; Yongjian Wan; Chunyan Shi; Bin Zhuo
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Paper Abstract

Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions.

Paper Details

Date Published: 25 July 2014
PDF: 5 pages
Opt. Eng. 53(7) 075106 doi: 10.1117/1.OE.53.7.075106
Published in: Optical Engineering Volume 53, Issue 7
Show Author Affiliations
Jia Wang, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Bin Fan, Institute of Optics and Electronics (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Chunyan Shi, Institute of Optics and Electronics (China)
Bin Zhuo, Institute of Optics and Electronics (China)


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