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Optical Engineering

Measurement of aspheric surfaces using annular subaperture stitching interferometry based on an automatic positioning method: theory and application
Author(s): Yongfu Wen; Haobo Cheng
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Paper Abstract

A simple and effective automatic positioning method (APM) is proposed for the application of annular subaperture stitching interferometry in the stage of precision polishing. In the testing process, a series of optical path difference (OPD) data of subaperture are obtained since the interferometer is shifted relative to the tested aspheric surface. These OPD data are analyzed by the APM to get the key stitching parameters (e.g., aspheric departure) without a precision motion system. The basic principles of the APM are described. The performance of the method is simulated in some pertinent cases. Finally, we study the applicability of the proposed method to subaperture stitching tests of a hyperbolic mirror. The stitching results agree with the full-aperture test results. It demonstrates the validity and practicability of the proposed algorithm.

Paper Details

Date Published: 14 July 2014
PDF: 10 pages
Opt. Eng. 53(7) 074104 doi: 10.1117/1.OE.53.7.074104
Published in: Optical Engineering Volume 53, Issue 7
Show Author Affiliations
Yongfu Wen, Beijing Institute of Technology (China)
Ngee Ann Polytechnic (Singapore)
Haobo Cheng, Beijing Institute of Technology (China)

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