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Optical Engineering

Flat-top distribution of excimer laser using ultrasonic grating
Author(s): Liang Lei; Xin Liu; Xiaobo Xing; Qu Wang
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Paper Abstract

A model to achieve flat-top distribution of ultraviolet (UV) excimer laser is presented. Reserving the practically lossless superiority in the traditional diffraction approach, the method improves a diffraction grating with a controllable grating period based on the acousto-optic diffraction effect. A theoretical analysis extending the Huygens–Fresnel principle and Gauss Schell model describing a typically partial coherent source of excimer is proposed, so that a fast Fourier transform numerical simulation could be utilized to calculate the optimized Raman–Nath comprehensive parameter of the acousto-optic medium. Such an excimer homogenous technology could be wisely used in UV lithography and micromachining.

Paper Details

Date Published: 3 June 2014
PDF: 6 pages
Opt. Eng. 53(6) 065102 doi: 10.1117/1.OE.53.6.065102
Published in: Optical Engineering Volume 53, Issue 6
Show Author Affiliations
Liang Lei, Guangdong Univ. of Technology (China)
Xin Liu, Guangdong Univ. of Technology (China)
Xiaobo Xing, South China Normal Univ. (China)
Qu Wang, Guangdong Univ. of Technology (China)

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