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Optical Engineering

Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror
Author(s): Cheng Bai; Jin Huang
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Paper Abstract

Electrostatically driven torsional micromirrors are suitable for optical microelectromechanical systems due to their good dynamic response, low adhesion, and simple structure for large-scale-integrated applications. For these devices, how to eliminate the excessive residual vibration in order to achieve more accurate positioning and faster switching is an important research topic. Because of the known nonlinearity issues, traditional shaping techniques based on linear theories are not suitable for nonlinear torsional micromirrors. In addition, due to the difficulties in calculating energy dissipation, the existing nonlinear command shaping techniques using energy method have neglected the effect of damping. We analyze the static and dynamic behavior of the electrostatically actuated torsional micromirrors. Based on the response of these devices, a multistep-shaping control considering the damping effects and the nonlinearity is proposed. Compared to the conventional closed-loop control, the proposed multistep-shaping control is a feedforward approach which can yield a good enough performance without extra sensors and actuators. Simulation results show that, without changing the system structure, the preshaping input reduces the settling time from 4.3 to 0.97 ms, and the overshoot percentage of the mirror response is decreased from 33.2% to 0.2%.

Paper Details

Date Published: 28 May 2014
PDF: 6 pages
Opt. Eng. 53(5) 057109 doi: 10.1117/1.OE.53.5.057109
Published in: Optical Engineering Volume 53, Issue 5
Show Author Affiliations
Cheng Bai, Xidian Univ. (China)
Xi’an Communication Institute (China)
Jin Huang, Xidian Univ. (China)

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