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Optical Engineering • Open Access

Micro-hole drilling and cutting using femtosecond fiber laser
Author(s): Huan Huang; Lih-Mei Yang; Jian Liu

Paper Abstract

Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no thermal damage were demonstrated with the aspect ratio of 81 . Micro-hole drilling in hard and soft tissues with no crack or collateral thermal damage is also demonstrated. Then, trench micromachining and cutting were studied for different materials and the effect of the laser parameters on the trench properties was investigated. Straight and clean trench edges were obtained with no thermal damage.

Paper Details

Date Published: 13 February 2014
PDF: 9 pages
Opt. Eng. 53(5) 051513 doi: 10.1117/1.OE.53.5.051513
Published in: Optical Engineering Volume 53, Issue 5
Show Author Affiliations
Huan Huang, PolarOnyx, Inc. (United States)
Lih-Mei Yang, PolarOnyx, Inc. (United States)
Jian Liu, PolarOnyx, Inc. (United States)


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