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Optical Engineering

Optimization stitching model for subaperture test of aspheric surfaces
Author(s): Yongfu Wen; Haobo Cheng
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Paper Abstract

Annular subaperture stitching interferometry (ASSI) is increasingly used for precision metrology of aspheric surfaces. The stitching model is a critical factor for stitching algorithms in ASSI. An optimized stitching model is proposed, which describes the alignment errors of adjacent subapertures based on an off-axis model and wave aberration theory. To keep the stitching errors from transmitting and accumulating, a simultaneous optimization algorithm is presented. The residual difference of overlapped regions of adjacent subapertures is utilized to evaluate the stitching accuracy. Finally, the comparative numerical simulations and experiments are carried out. It shows that the optimized stitching model has a better performance and validity.

Paper Details

Date Published: 8 April 2014
PDF: 9 pages
Opt. Eng. 53(4) 044105 doi: 10.1117/1.OE.53.4.044105
Published in: Optical Engineering Volume 53, Issue 4
Show Author Affiliations
Yongfu Wen, Beijing Institute of Technology (China)
Haobo Cheng, Beijing Institute of Technology (China)

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