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Optical Engineering • Open Access

Optical three-dimensional vibrometer microscope with picometer-resolution in x, y, and z
Author(s): Christian Rembe; Robert Kowarsch; Wanja Ochs; Alexander Dräbenstedt; Moritz Giesen; Marcus Winter

Paper Abstract

The state-of-the-art technique for optical vibration analysis of macroscopic structures is laser-Doppler vibrometry in which a single-laser beam measures the motion in the beam direction. Thus, three laser beams are necessary to investigate three-dimensional (3-D) motions. The laser spots can be separated on macroscopic specimens with scattering surfaces to prevent optical crosstalk between the measurement beams, but such separation is impossible for a microscopic scatter point. We demonstrate a solution for this problem: an optical 3-D vibrometer microscope with a single-impinging laser beam, which collects scattered light from at least three directions. We prove that it is possible to realize a small laser focus of <3.5-μm diameter on a proper scatter point such as an etch hole of a microelectromechanical-systems device to obtain real-time, 3-D vibration measurements with megahertz vibration bandwidth and picometer amplitude resolution. A first measurement of operational-deflection shapes is presented.

Paper Details

Date Published: 26 March 2014
PDF: 7 pages
Opt. Eng. 53(3) 034108 doi: 10.1117/1.OE.53.3.034108
Published in: Optical Engineering Volume 53, Issue 3
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)
Robert Kowarsch, Polytec GmbH (Germany)
Wanja Ochs, Polytec GmbH (Germany)
Alexander Dräbenstedt, Polytec GmbH (Germany)
Moritz Giesen, Polytec GmbH (Germany)
Marcus Winter, Polytec GmbH (Germany)

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