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Optical Engineering

Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation
Author(s): Wei Huang; Chengfu Ma; Yuhang Chen
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Paper Abstract

A method for simple and reliable displacement measurement with nanoscale resolution is proposed. The measurement is realized by combining a common optical microscopy imaging of a specially coded nonperiodic microstructure, namely two-dimensional zero-reference mark (2-D ZRM), and subsequent correlation analysis of the obtained image sequence. The autocorrelation peak contrast of the ZRM code is maximized with well-developed artificial intelligence algorithms, which enables robust and accurate displacement determination. To improve the resolution, subpixel image correlation analysis is employed. Finally, we experimentally demonstrate the quasi-static and dynamic displacement characterization ability of a micro 2-D ZRM.

Paper Details

Date Published: 18 December 2014
PDF: 6 pages
Opt. Eng. 53(12) 124103 doi: 10.1117/1.OE.53.12.124103
Published in: Optical Engineering Volume 53, Issue 12
Show Author Affiliations
Wei Huang, Univ. of Science and Technology of China (China)
Chengfu Ma, Univ. of Science and Technology of China (China)
Yuhang Chen, Univ. of Science and Technology of China (China)


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