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Optical Engineering

Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage
Author(s): Jens Flügge; Rainer Köning; Eugen Schötka; Christoph Weichert; Paul Köchert; Harald Bosse; Horst Kunzmann
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Paper Abstract

The paper describes recent improvements of Physikalisch-Technische Bundesanstalt's (PTB) reference measuring instrument for length graduations, the so-called nanometer comparator, intended to achieve a measurement uncertainty in the domain of 1 nm for a length up to 300 mm. The improvements are based on the design and realization of a new sample carriage, integrated into the existing structure and the optimization of coupling this new device to the vacuum interferometer, by which the length measuring range of approximately 540 mm with sub-nm resolution is given. First, measuring results of the enhanced nanometer comparator are presented and discussed, which show the improvements of the measuring capabilities and verify the step toward the sub-nm accuracy level.

Paper Details

Date Published: 22 May 2014
PDF: 5 pages
Opt. Eng. 53(12) 122404 doi: 10.1117/1.OE.53.12.122404
Published in: Optical Engineering Volume 53, Issue 12
Show Author Affiliations
Jens Flügge, Physikalisch-Technische Bundesanstalt (Germany)
Rainer Köning, Physikalisch-Technische Bundesanstalt (Germany)
Eugen Schötka, Physikalisch-Technische Bundesanstalt (Germany)
Christoph Weichert, Physikalisch-Technische Bundesanstalt (Germany)
Paul Köchert, Physikalisch-Technische Bundesanstalt (Germany)
Harald Bosse, Physikalisch-Technische Bundesanstalt (Germany)
Horst Kunzmann, Physikalisch-Technische Bundesanstalt (Germany)

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