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Optical Engineering

Effect of annealing on the structural and UV photoluminescence properties of Sb-doped SnO2 films deposited on Al2O3 (0001) substrates by RF magnetron sputtering
Author(s): Xianjin Feng; Yi Luo; Caina Luan
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Paper Abstract

The antimony-doped tin oxide (SnO2∶Sb) films have been deposited on the Al2O3 (0001) substrates by RF magnetron sputtering. The influence of annealing on the structural and photoluminescence (PL) properties of the SnO2∶Sb films was investigated. The prepared samples were polycrystalline films having a rutile structure of pure SnO2 and a preferred orientation along the (110) direction, with an improvement in the film crystallinity observed after annealing. An ultraviolet PL peak near 334 nm was observed at room temperature both before and after annealing. The corresponding PL mechanism was discussed in detail.

Paper Details

Date Published: 1 December 2014
PDF: 4 pages
Opt. Eng. 53(11) 117111 doi: 10.1117/1.OE.53.11.117111
Published in: Optical Engineering Volume 53, Issue 11
Show Author Affiliations
Xianjin Feng, Shandong University (China)
Yi Luo, Shandong Univ. (China)
Caina Luan, Shandong Univ. (China)

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