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Optical Engineering

Quantitative interferometric microscopy with improved full-field phase aberration compensation
Author(s): Liang Xue; Shouyu Wang; Keding Yan; Nan Sun; Zhen-hua Li; Fei Liu
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Paper Abstract

Single-shot quantitative interferometric microscopy (QIM) needs a high-accuracy and rapid phase retrieval algorithm. Retrieved phase distributions are often influenced by phase aberration background caused by both imaging system and phase retrieval algorithms. Here, we propose an improved phase aberration compensation (PAC) approach in order to eliminate the phase aberrations inherent in the data. With this method, sample-free parts are identified and used to calculate the background phase, reducing phase errors induced in samples and providing high-quality phase images. We now demonstrate that QIM based on this PAC approach realizes high-quality phase imaging from a single interferogram. This is of great potential for a real-time speedy diagnosis.

Paper Details

Date Published: 6 November 2014
PDF: 7 pages
Opt. Eng. 53(11) 113105 doi: 10.1117/1.OE.53.11.113105
Published in: Optical Engineering Volume 53, Issue 11
Show Author Affiliations
Liang Xue, Shanghai Univ. of Electric Power (China)
Shouyu Wang, Nanjing Univ. of Science and Technology (China)
Nanjing Agricultural Univ. (China)
Keding Yan, Nanjing Univ. of Science and Technology (China)
Xi’an Technological Univ. (China)
Nan Sun, Shanghai Institute of Quality Inspection and Technical Research (China)
Zhen-hua Li, Nanjing Univ. of Science and Technology (China)
Fei Liu, Nanjing Agricultural Univ. (China)


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