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Optical Engineering • Open Access

Diffractive characterization of the vibrational state of an array of microcantilevers
Author(s): Alexander Cuadrado; Jordi Agusti; Gabriel Abadal; Javier Alda

Paper Abstract

The vibrational state of an array of microcantilevers piezoelectrically excited has been characterized analyzing the far-field diffraction pattern produced by the structure. A model based on the definition of a complex reflectivity window has been developed to fully understand the dynamic of the elements and the diffraction pattern produced by them. This model is parameterized by the driving voltage of the excitation, the vibration mode, and the phase correlation among cantilevers. An experimental set-up has been developed to register the far-field diffraction patterns, avoiding some undesired reflections from the surrounding structures. The experimental results have been fitted with those obtained from the simulation. This fitting allows for identifying the vibration mode and the phase relation among cantilevers.

Paper Details

Date Published: 30 April 2013
PDF: 7 pages
Opt. Eng. 52(9) 091717 doi: 10.1117/1.OE.52.9.091717
Published in: Optical Engineering Volume 52, Issue 9
Show Author Affiliations
Alexander Cuadrado, Univ. Complutense de Madrid (Spain)
Jordi Agusti, Univ. Autònoma de Barcelona (Spain)
Gabriel Abadal, Univ. Autònoma de Barcelona (Spain)
Javier Alda, Univ. Complutense de Madrid (Spain)

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