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Optical Engineering

Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method
Author(s): Fengtao Yan; Bin Fan; Xi Hou; Fan Wu
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Paper Abstract

A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method.

Paper Details

Date Published: 9 August 2013
PDF: 7 pages
Opt. Eng. 52(8) 085101 doi: 10.1117/1.OE.52.8.085101
Published in: Optical Engineering Volume 52, Issue 8
Show Author Affiliations
Fengtao Yan, Institute of Optics and Electronics (China)
Bin Fan, Institute of Optics and Electronics (China)
Xi Hou, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)


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