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Optical Engineering

Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template
Author(s): Zhao Wu; Qing-na Wang; Hong-da Sun; Miao Lu
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Paper Abstract

Here, we introduced a new method to fabricate a shape-controllable microlens array (MLA). A conductive membrane was deformed by electrostatic force through applied voltage on its underneath electrodes, and polymer primer was poured in this concave template to form an MLA after curing and a demolding process. Through changing the initial contour of the template as well as the location and bias of the underneath electrodes, the so-called molding by electrostatic force deformed template (MEFDT) method has the ability to realize a shape-controllable microsized MLA in a flexible, easy-to-design, and low-cost way. Polydimethylsiloxane MLAs were fabricated to verify this MEFDT method, and the fabricated MLAs had a surface roughness less than 2 nm that showed acceptable optical smoothness, and their focal lengths were demonstrated to be adjustable by applying different voltage on their affiliated templates.

Paper Details

Date Published: 4 June 2013
PDF: 7 pages
Opt. Eng. 52(6) 063401 doi: 10.1117/1.OE.52.6.063401
Published in: Optical Engineering Volume 52, Issue 6
Show Author Affiliations
Zhao Wu, Xiamen Univ. (China)
Qing-na Wang, Xiamen Univ. (China)
Hong-da Sun, Xiamen Univ. (China)
Miao Lu, Xiamen Univ. (China)

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