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Optical Engineering

Measurement system of dynamic microscopic deformation for membrane based on fringe projection
Author(s): Feipeng Zhu; Dong Lei; Xiaoyuan He
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Paper Abstract

The bulge test has been utilized extensively in determining the mechanical properties of thin film materials. We develop a bulge-test system that consists of three main components, including an optical system, a loading system, and a control system. A telecentric lens is adopted as an imaging camera in an optical system to provide high imaging quality along with a constant angle of view across the entire field of view. The out-of-plane deformation is obtained by projecting a sinusoidal fringe pattern onto a specimen surface and analyzing recorded images with a digital image correlation algorithm. A least-squares polynomial fitting is presented to solve the problem that the out-of-plane calibration coefficient is not a constant. Experiments were performed to validate the availability and reliability of this proposed bulge-test system in the measurement of a dynamic microscopic deformation of membrane. The measuring range of deformation is from several microns to hundreds of microns with an accuracy of 0.6 μm.

Paper Details

Date Published: 20 March 2013
PDF: 9 pages
Opt. Eng. 52(3) 033604 doi: 10.1117/1.OE.52.3.033604
Published in: Optical Engineering Volume 52, Issue 3
Show Author Affiliations
Feipeng Zhu, Hohai Univ. (China)
Dong Lei, Hohai Univ. (China)
Xiaoyuan He, Southeast Univ. (China)

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