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Optical Engineering • Open Access

Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays
Author(s): Daniel J. Merthe; Valeriy V. Yashchuk; Kenneth A. Goldberg; Martin Kunz; Nobumichi Tamura; Wayne R. McKinney; Nikolay A. Artemiev; Richard S. Celestre; Gregory Y. Morrison; Erik H. Anderson; Brian V. Smith; Edward E. Domning; Senajith B. Rekawa; Howard A. Padmore

Paper Abstract

We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the Advanced Light Source Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200  nm (horizontal)×100  nm (vertical) . After applying this methodology, we measured a beam waist size of 290  nm (horizontal130  nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.

Paper Details

Date Published: 14 March 2013
PDF: 14 pages
Opt. Eng. 52(3) 033603 doi: 10.1117/1.OE.52.3.033603
Published in: Optical Engineering Volume 52, Issue 3
Show Author Affiliations
Daniel J. Merthe, Lawrence Berkeley National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
Martin Kunz, Lawrence Berkeley National Lab. (United States)
Nobumichi Tamura, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Richard S. Celestre, Lawrence Berkeley National Lab. (United States)
Gregory Y. Morrison, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Brian V. Smith, Lawrence Berkeley National Lab. (United States)
Edward E. Domning, Lawrence Berkeley National Lab. (United States)
Senajith B. Rekawa, Lawrence Berkeley National Lab. (United States)
Howard A. Padmore, Lawrence Berkeley National Lab. (United States)


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