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Optical Engineering • Open Access

Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system
Author(s): Cheng Gong; Yuejin Zhao; Liquan Dong; Mei Hui; Xiaomei Yu; Xiaohua Liu

Paper Abstract

We aim to study the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability based on optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system. First, the principle of the bimaterial microcantilever sensing and the fabrication of the microcantilever array are introduced. Second, the optical-thermal-mechanical sensing theories based on the FPA are given. Finally, an optical readout microcantilever FPA infrared imaging system is developed for SWIR, MWIR, and LWIR imaging experiments. The experimental results show that the system can acquire the clear images of the SWIR, MWIR, and LWIR targets.

Paper Details

Date Published: 5 February 2013
PDF: 7 pages
Opt. Eng. 52(2) 026403 doi: 10.1117/1.OE.52.2.026403
Published in: Optical Engineering Volume 52, Issue 2
Show Author Affiliations
Cheng Gong, Beijing Institute of Technology (China)
Yuejin Zhao, Beijing Institute of Technology (China)
Liquan Dong, Beijing Institute of Technology (China)
Mei Hui, Beijing Institute of Technology (China)
Xiaomei Yu, Peking Univ. (China)
Xiaohua Liu, Beijing Institute of Technology (China)

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