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Optical Engineering • Open Access

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard
Author(s): Jeremias Seppä; Ivan Kassamakov; Ville Heikkinen; Anton Nolvi; Tor Paulin; Antti Lassila; Edward Hæggström

Paper Abstract

A stroboscopic scanning white light interferometer (SSWLI) can characterize both static features and motion in micro(nano)electromechanical system devices. SSWLI measurement results should be linked to the meter definition to be comparable and unambiguous. This traceability is achieved by careful error characterization and calibration of the interferometer. The main challenge in vertical scale calibration is to have a reference device with reproducible out-of-plane movement. A piezo-scanned flexure guided stage with capacitive sensor feedback was attached to a mirror and an Invar steel holder with a reference plane—forming a transfer standard that was calibrated by laser interferometry with 2.3 nm uncertainty. The moving mirror vertical position was then measured with the SSWLI, relative to the reference plane, between successive mirror position steppings. A light-emitting diode pulsed at 100 Hz with 0.5% duty cycle synchronized to the CCD camera and a halogen light source were used. Inside the scanned 14 μm range, the measured SSWLI scale amplification coefficient error was 0.12% with 4.5 nm repeatability of the steps. For SWLI measurements using a halogen lamp, the corresponding results were 0.05% and 6.7 nm. The presented methodology should permit accurate traceable calibration of the vertical scale of any SWLI.

Paper Details

Date Published: 16 December 2013
PDF: 7 pages
Opt. Eng. 52(12) 124104 doi: 10.1117/1.OE.52.12.124104
Published in: Optical Engineering Volume 52, Issue 12
Show Author Affiliations
Jeremias Seppä, Metrologie und Akkreditierung Schweiz (Finland)
Ivan Kassamakov, Univ. of Helsinki (Finland)
Ville Heikkinen, Metrologie und Akkreditierung Schweiz (Finland)
Anton Nolvi, Univ. of Helsinki (Finland)
Tor Paulin, Univ. of Helsinki (Finland)
Antti Lassila, Metrologie und Akkreditierung Schweiz (Finland)
Edward Hæggström, Univ. of Helsinki (Finland)


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