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Optical Engineering

Diffractive optics calibrator: design and construction
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Paper Abstract

We present a new device, the diffractive optics calibrator, for measuring duty cycle and etching depth for computer-generated holograms (CGHs). The system scans the CGH with a collimated laser beam and collects the far-field diffraction pattern with a CCD array. The relative intensities of the various orders of diffraction are used to fit the phase shift from etching and the duty cycle of the binary pattern. The system is capable of measuring variations that cause 1-nm peak-to-valley (PV) phase errors in the wavefront created by the CGH. The measurements will be used primarily for quality control CGHs, but the data can also be used to provide a lookup table for corrections that allow calibration of the lithography errors. Such calibrations may be necessary for us to achieve our goal of measuring freeform aspheric surfaces with 1-nm RMS accuracy.

Paper Details

Date Published: 4 December 2013
PDF: 8 pages
Opt. Eng. 52(12) 124101 doi: 10.1117/1.OE.52.12.124101
Published in: Optical Engineering Volume 52, Issue 12
Show Author Affiliations
Wenrui Cai, College of Optical Sciences, The Univ. of Arizona (United States)
Ping Zhou, College of Optical Sciences, The Univ. of Arizona (United States)
Chunyu Zhao, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)


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