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Optical Engineering

High-accuracy magnification calibration for a microscope based on an improved discrete Fourier transform
Author(s): Xianglu Dai; Huimin Xie; Chuanwei Li; Zhu Wu; Hongxia Geng
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Paper Abstract

Microscopes are widely applied in characterizing feature sizes at the micro-/nanoscale, and magnification calibration plays a key role in achieving precise measurements. However, it is difficult to obtain accurate results by using the general magnification calibration method if comparing the displayed size of a test-piece under microscope and its original one. In this study, a high-accuracy and automatic magnification calibration method that could be applied to different types of microscopes is proposed. A standard grating is employed as the reference, and a high-resolution discrete Fourier transform is used to analyze the images captured under various magnifications in this method. With utilization of the high-order harmonic component in the Fourier spectrum, the proposed method is capable of performing the calibration over a wide range of magnifications while maintaining identical precision. The relative error of the proposed method can be theoretically limited to 0.01%; moreover, the image noise can be tolerated. Furthermore, the validation and extensive adaptability of this method are demonstrated by calibrating the magnification of a scanning electron microscope and an optical microscope.

Paper Details

Date Published: 18 November 2013
PDF: 9 pages
Opt. Eng. 52(11) 114102 doi: 10.1117/1.OE.52.11.114102
Published in: Optical Engineering Volume 52, Issue 11
Show Author Affiliations
Xianglu Dai, Tsinghua Univ. (China)
Huimin Xie, Tsinghua Univ. (China)
Chuanwei Li, Tsinghua Univ. (China)
Zhu Wu, Mako Surgical Corp. (United States)
Hongxia Geng, Tsinghua Univ. (China)

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