Optical EngineeringConfocal multiple-transmitted-light interference microscope with increased lateral resolution
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A plane-parallel plate of a specific thickness placed in front of the collecting lens in a confocal microscope (CM) is used to produce multiple-transmitted-light interference to sharpen the Airy main lobe so that the lateral resolution in the x -direction can be further improved. Numerical experiments show that the lateral full-width at half maximum in the x -direction has been narrowed down to 50 nm, and the lateral resolution has been improved by 80% in comparison with a conventional CM when thickness d =5 mm , reflectivity R=0.7 , and NA=0.65 .