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Optical Engineering

Confocal multiple-transmitted-light interference microscope with increased lateral resolution
Author(s): Lirong Qiu; Weiqian Zhao
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Paper Abstract

A plane-parallel plate of a specific thickness placed in front of the collecting lens in a confocal microscope (CM) is used to produce multiple-transmitted-light interference to sharpen the Airy main lobe so that the lateral resolution in the x -direction can be further improved. Numerical experiments show that the lateral full-width at half maximum in the x -direction has been narrowed down to 50 nm, and the lateral resolution has been improved by 80% in comparison with a conventional CM when thickness d =5  mm , reflectivity R=0.7 , and NA=0.65 .

Paper Details

Date Published: 23 October 2013
PDF: 4 pages
Opt. Eng. 52(10) 100504 doi: 10.1117/1.OE.52.10.100504
Published in: Optical Engineering Volume 52, Issue 10
Show Author Affiliations
Lirong Qiu, Beijing Institute of Technology (China)
Weiqian Zhao, Beijing Institute of Technology (China)

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