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Optical Engineering

Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics
Author(s): Jianqiang Ma; Ying Liu; Yanlei Hu; Chen Xu; Baoqing Li; Jiaru Chu
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Paper Abstract

This paper presents a low-cost silicon unimorph deformable mirror (DM) that will be used for astronomical adaptive optics. The device has a simple construction consisting of a 400-μm-thick silicon wafer and a 200-μm-thick lead zirconate titanate film, with 214 actuators and 50-mm active aperture. The actuator displacement of the fabricated device is about 1 μm at 50 V. And the resonance frequency is 550 Hz. The simulation and experimental generation of Zernike mode shapes indicate that the fabricated DM has an excellent correction performance for both low order and high order aberrations.

Paper Details

Date Published: 7 January 2013
PDF: 7 pages
Opt. Eng. 52(1) 016602 doi: 10.1117/1.OE.52.1.016602
Published in: Optical Engineering Volume 52, Issue 1
Show Author Affiliations
Jianqiang Ma, Ningbo Univ. (China)
Ying Liu, Univ. of Science and Technology of China (China)
Yanlei Hu, Univ. of Science and Technology of China (China)
Chen Xu, Nanjing Institute of Astronomical Optics & Technology (China)
Baoqing Li, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)


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