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Optical Engineering • Open Access

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method
Author(s): Wenlin Liao; Yifan Dai; Xuhui Xie; Lin Zhou

Paper Abstract

We propose a deterministic figuring method for fabricating high-precision optical surfaces by combining ion beam material adding (IBA) and material removal [ion beam figuring (IBF)] technology. The IBA is first utilized to improve the accuracy and quality of the optical surface by deterministically adding material to the local pits, and then the IBF is applied to further improve the surface accuracy through removing the local protuberances. Compared with current IBF technology, this combined method can realize the uniform convergence of the surface errors and simultaneously increase the convergence rate of the figuring process.

Paper Details

Date Published: 7 January 2013
PDF: 4 pages
Opt. Eng. 52(1) 010503 doi: 10.1117/1.OE.52.1.010503
Published in: Optical Engineering Volume 52, Issue 1
Show Author Affiliations
Wenlin Liao, National Univ. of Defense Technology (China)
Yifan Dai, National Univ. of Defense Technology (China)
Xuhui Xie, National Univ. of Defense Technology (China)
Lin Zhou, National Univ. of Defense Technology (China)


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