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Optical Engineering

Illumination-invariant phase-shifting algorithm for three-dimensional profilometry of a moving object
Author(s): Fuqin Deng; Chang Liu; Wuifung Sze; Jiangwen Deng; Kenneth S. M. Fung; Winghong Leung; Edmund Y. Lam
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Paper Abstract

Uneven illumination is a common problem in practical optical systems designed for machine vision applications, and it leads to significant errors when phase-shifting algorithms (PSA) are used to reconstruct the surface of a moving object. We propose an illumination-reflectivity-focus model to characterize this uneven illumination effect on phase-measuring profilometry. With this model, we separate the illumination factor effectively and consider the phase reconstruction from an optimization perspective. Furthermore, we formulate an illumination-invariant phase-shifting algorithm (II-PSA) to reconstruct the surface of a moving object under an uneven illumination environment. Experimental results show that it can improve the reconstruction quality both visually and numerically.

Paper Details

Date Published: 13 September 2012
PDF: 11 pages
Opt. Eng. 51(9) 097001 doi: 10.1117/1.OE.51.9.097001
Published in: Optical Engineering Volume 51, Issue 9
Show Author Affiliations
Fuqin Deng, The Univ. of Hong Kong (Hong Kong, China)
Chang Liu, ASM Pacific Technology Ltd. (Hong Kong, China)
Wuifung Sze, ASM Pacific Technology Ltd. (Hong Kong, China)
Jiangwen Deng, ASM Pacific Technology Ltd. (Hong Kong, China)
Kenneth S. M. Fung, ASM Pacific Technology Ltd. (Hong Kong, China)
Winghong Leung, ASM Pacific Technology Ltd. (Hong Kong, China)
Edmund Y. Lam, The Univ. of Hong Kong (Hong Kong, China)


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