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Optical Engineering

Low-magnification polarization phase-shifting interference microscope for three-dimensional profilometry
Author(s): Nandini Ghosh; Sanjukta Sarkar; Kallol Bhattacharya
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Paper Abstract

An interferometric technique for three-dimensional phase measurement of optically transparent microscopic phase samples is presented. An obliquely aligned polarizer-masked cube beam-splitter, an infinity-corrected microscope objective, and a couple of simple polarization phase-shifting components serve as the setup for such a measurement. Surface phase profiles are then extracted using standard phase-shifting algorithms. The salient features of the proposed technique are its simple design, in-line configuration, possibility of integration with standard microscopic systems, and inherent compensation of the substrate phase. Experimental results are presented. The overall lateral magnification is restricted due to the low numerical aperture offered by the microscope objective and cube beam-splitter combination.

Paper Details

Date Published: 3 August 2012
PDF: 6 pages
Opt. Eng. 51(8) 085601 doi: 10.1117/1.OE.51.8.085601
Published in: Optical Engineering Volume 51, Issue 8
Show Author Affiliations
Nandini Ghosh, Univ. of Calcutta (India)
Sanjukta Sarkar, TECHNO INDIA (India)
Kallol Bhattacharya, Univ. of Calcutta (India)

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