Share Email Print

Optical Engineering

Calibration of absolute planarity flats: generalized iterative approach
Author(s): Maurizio M. Vannoni; Andrea Sordini; Giuseppe Molesini
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

Absolute planarity measurement with interferometric data and iterative surface recovering approaches is briefly reviewed. Extension to the case of multiple measurements is outlined, and demonstration with synthetic data is provided. A generalized approach is finally presented, making use of operators representing the manipulations occurred with the surfaces taking part in the generation of the interferograms. The potential advantages of the new interferogram processing technique are pointed out.

Paper Details

Date Published: 21 May 2012
PDF: 6 pages
Opt. Eng. 51(8) 081510 doi: 10.1117/1.OE.51.8.081510
Published in: Optical Engineering Volume 51, Issue 8
Show Author Affiliations
Maurizio M. Vannoni, Istituto Nazionale di Ottica (Italy)
Andrea Sordini, Istituto Nazionale di Ottica (Italy)
Giuseppe Molesini, Istituto Nazionale di Ottica (Italy)

© SPIE. Terms of Use
Back to Top