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Optical Engineering

Microelectromechanical systems-based visible-near infrared Fabry-Perot tunable filters using quartz substrate
Author(s): Neelam Gupta; Songsheng Tan; Dennis R. Zander
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Paper Abstract

There is a need to develop miniature optical tunable filters for small hyperspectral imagers. We plan to develop a number of miniature Fabry-Perot tunable filters (FPTFs) using microelectromechanical systems (MEMS) technology, each operating over a different wavelength region, to cover spectral regions from the visible to the longwave infrared (IR). Use of a MEMS-based FPTF as a dispersive element will reduce the size, weight, and power requirements of hyperspectral imagers and make them less expensive. A key requirement for such a filter is a large optical aperture. Recently, we succeeded in fabricating FPTFs with a 6 mm optical aperture operating in the visible to near IR spectral region (400 to 800 nm) using commercially available thin quartz wafers as the substrate. The FPTF design contains one fixed silver (Ag) mirror and one electrostatically movable Ag mirror, each grown on a quartz substrate with a low total thickness variation. Gold (Au) bumps are used to control the initial air gap distance between the two mirrors, and Au-Au bonding is used to bond the device. We describe material selection, device design, modeling, fabrication, interferometric, and spectral characterizations.

Paper Details

Date Published: 19 July 2012
PDF: 9 pages
Opt. Eng. 51(7) 074007 doi: 10.1117/1.OE.51.7.074007
Published in: Optical Engineering Volume 51, Issue 7
Show Author Affiliations
Neelam Gupta, U.S. Army Research Lab. (United States)
Songsheng Tan, Smart System Technology & Commercialization Ctr. (United States)
Dennis R. Zander, Smart System Technology & Commercialization Ctr. (United States)


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