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Optical Engineering

Vanadium oxide microbolometer with gold black absorbing layer
Author(s): Bin Wang; Jianjun Lai; Sihai Chen; Erjing Zhao; Haoming Hu; Qian Lu
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Paper Abstract

Vanadium oxide uncooled bolometer with gold black absorber of high long-wave-infrared-rays absorption has been fabricated and optimized. The fabrication processes for mirobolometer were developed with surface micromachining below 350°C. We evaluated gold black film reflectance by Fourier transform infrared spectroscopy. Low reflectance shows that gold black has good absorption at 8 to 14 μm infrared window. Detector tests show that a bolometer with gold black absorber, compared with the one without gold black, had better performance, with maximum responsivity and detectivity of 8.4×104  V/W and 6.16×108  cm Hz1/</sup<2/W, respectively, at 13 Hz chopper frequency and bias current 67 μA.

Paper Details

Date Published: 5 July 2012
PDF: 7 pages
Opt. Eng. 51(7) 074003 doi: 10.1117/1.OE.51.7.074003
Published in: Optical Engineering Volume 51, Issue 7
Show Author Affiliations
Bin Wang, Wuhan National Lab. for Optoelectronics (China)
Jianjun Lai, Wuhan National Lab. for Optoelectronics (China)
Sihai Chen, Wuhan National Lab. for Optoelectronics (China)
Erjing Zhao, Huazhong Univ. of Science and Technology (China)
Haoming Hu, Huazhong Univ. of Science and Technology (China)
Qian Lu, Huazhong Univ. of Science and Technology (China)


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