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Optical Engineering

Swing arm optical coordinate-measuring machine: high precision measuring ground aspheric surfaces using a laser triangulation probe
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Paper Abstract

The swing arm optical coordinate-measuring machine (SOC), a profilometer with a distance measuring interferometric sensor for in situ measurement of the topography of aspheric surfaces, has shown a precision rivaling the full aperture interferometric test. To further increase optical manufacturing efficiency, we enhance the SOC with an optical laser triangulation sensor for measuring test surfaces in their ground state before polishing. The calibrated sensor has good linearity and is insensitive to the angular variations of the surfaces under testing. Sensor working parameters such as sensor tip location, projection beam angle, and measurement direction are calibrated and incorporated in the SOC data reduction software to relate the sensor readout with the test surface sag. Experimental results show that the SOC with the triangulation sensor can measure aspheric ground surfaces with an accuracy of 100 nm rms or better.

Paper Details

Date Published: 6 July 2012
PDF: 9 pages
Opt. Eng. 51(7) 073603 doi: 10.1117/1.OE.51.7.073603
Published in: Optical Engineering Volume 51, Issue 7
Show Author Affiliations
Yuhao Wang, College of Optical Sciences, The Univ. of Arizona (United States)
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
Robert E. Parks, College of Optical Sciences, The Univ. of Arizona (United States)
Chang Jin Oh, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)


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