Share Email Print

Optical Engineering

New raster-scanned CO2 laser heater for pulsed laser deposition applications: design and modeling for homogenous substrate heating
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report on designing a new raster-scanned CO2 laser heater for homogenous heating of the disk-shaped substrates during pulsed laser depositioning of materials. This new design aims at concentrating the laser energy near the substrate peripheral edge, which mostly tends to remain cooler than the inner parts during the heating process. A comprehensive heat diffusion model has been developed to predict the temperature and its homogeneity on the substrate depositioning face. Conduction and radiation heat transfer in three dimensions with temperature dependant material properties and a moving heat source are taken into account in this transient model. The model is validated by a simple stationary Gaussian laser heat source whose results are in good agreement with our measured values. Using this model, optimum conditions for the growth of garnets are calculated. Short heat-up times, some within minutes, are corroborated by calculations and measurements. An experimental procedure is designed to test the possibility of optical damage occurring in the substrate during this short temperature heat-up time.

Paper Details

Date Published: 6 April 2012
PDF: 10 pages
Opt. Eng. 51(4) 044301 doi: 10.1117/1.OE.51.4.044301
Published in: Optical Engineering Volume 51, Issue 4
Show Author Affiliations
Muhammad R. Rashidian Vaziri, Laser and Optics Research School (Iran, Islamic Republic of)
Fereshteh Hajiesmaeilbaigi, NSTRI Laser & Optics Research School (Iran, Islamic Republic of)
Mohammad Hadi Maleki, NSTRI Laser and Optics Research School (Iran, Islamic Republic of)

© SPIE. Terms of Use
Back to Top