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Optical Engineering

Modeling of subwavelength problems using modal techniques
Author(s): Ismail M. Nassar; Diaa Khalil; Omar A. Omar; Aladin H. Kamel
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Paper Abstract

A modal technique is used for modeling the problem of light propagation through masks with subwavelength features. Different approaches for the proper treatment of the excitation and the finite window are discussed. Results obtained using the technique are compared to those obtained by the volume integral equation method and the finite difference time domain method. The proposed technique shows very good agreement with both methods as well as significant reduction in the simulation time compared to the finite difference time domain method.

Paper Details

Date Published: 23 March 2012
PDF: 7 pages
Opt. Eng. 51(3) 038001 doi: 10.1117/1.OE.51.3.038001
Published in: Optical Engineering Volume 51, Issue 3
Show Author Affiliations
Ismail M. Nassar, Ain Shams Univ. (Egypt)
Diaa Khalil, Ain Shams Univ. (Egypt)
Omar A. Omar, Ain Shams Univ. (Egypt)
Aladin H. Kamel, Advanced Industrial Technical and Engineering Ctr. (Egypt)


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