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Optical Engineering

Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors
Author(s): Wenlin Liao; Yifan Dai; Xuhui Xie; Lin Zhou; Zheng Yuan
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Paper Abstract

In deterministic ion beam figuring (IBF) technology, the application of small ion beam enhances the corrective capability for mid-to-high spatial frequency errors on the optical surface, which directly determines the surface accuracy of the figuring process. But when the diameter of the ion beam becomes smaller, the machining errors will have a stronger influence on the final figuring result, so these errors must be controlled through corresponding methods. We investigate the corrective principle in IBF for surface errors of different spatial frequencies and establish the selection criterion for removal function in different figuring stages to realize the rapid convergence of surface accuracy. Then, through analyzing and controlling the machining errors in the figuring process, high-precision mirrors can be rapidly obtained. Finally, experiments on fused silica planar and spherical samples are conducted on our self-developed IBF system, and their final surface accuracy are both smaller than 1.1 nm RMS (root-mean-square) and 12.0 nm PV (Peak-to-Valley) after several iterations within 20 min.

Paper Details

Date Published: 13 March 2012
PDF: 9 pages
Opt. Eng. 51(3) 033402 doi: 10.1117/1.OE.51.3.033402
Published in: Optical Engineering Volume 51, Issue 3
Show Author Affiliations
Wenlin Liao, National Univ. of Defense Technology (China)
Yifan Dai, National Univ. of Defense Technology (China)
Xuhui Xie, National Univ. of Defense Technology (China)
Lin Zhou, National Univ. of Defense Technology (China)
Zheng Yuan, National Univ. of Defense Technology (China)

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